Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Research output: Contribution to conferencePosterOther research output

Abstract

Thin ruthenium films are used in several applications such as catalysis, electronics and optical coatings. Due to its low-oxidation properties, Ru films are suitable as bottom electrodes in capacitors or as capping layer for extreme ultraviolet lithography optics. For both applications, it is important that the Ru layer is fully closed in order to prevent oxidation of the underlying material, which can cause a performance failure. We monitored magnetron sputter deposition of Ru on Si, SiNx and SiO2 thin films by in vacuo Low Energy Ion Scattering. On top of Si 4.4 nm of Ru is needed to close the layer, which is mainly attributed to interdiffusion. By passivating the Si with nitrogen or oxygen, the Ru thickness for closing the layer can be reduced to 3 nm or even 1.7 nm on SiNx or SiO2, respectively. The diffusion kinetics and in-depth diffusion profiles of Ru deposited on Si, SiNx and SiO2 have been derived.
Original languageEnglish
Pages-
Publication statusPublished - 19 Jan 2016
EventPhysics@FOM Veldhoven 2016 - NH Koningshof Veldhoven, Veldhoven, The Netherlands, Netherlands
Duration: 20 Jan 201620 Jan 2016

Conference

ConferencePhysics@FOM Veldhoven 2016
Abbreviated titleFOM
CountryNetherlands
CityVeldhoven, The Netherlands
Period20/01/1620/01/16

Fingerprint

ion scattering
kinetics
coatings
oxidation
optical coatings
energy
closing
ruthenium
catalysis
capacitors
lithography
optics
nitrogen
electrodes
causes
oxygen
thin films
profiles
electronics

Keywords

  • METIS-314618

Cite this

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A., & Bijkerk, F. (2016). Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS). -. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.
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title = "Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)",
abstract = "Thin ruthenium films are used in several applications such as catalysis, electronics and optical coatings. Due to its low-oxidation properties, Ru films are suitable as bottom electrodes in capacitors or as capping layer for extreme ultraviolet lithography optics. For both applications, it is important that the Ru layer is fully closed in order to prevent oxidation of the underlying material, which can cause a performance failure. We monitored magnetron sputter deposition of Ru on Si, SiNx and SiO2 thin films by in vacuo Low Energy Ion Scattering. On top of Si 4.4 nm of Ru is needed to close the layer, which is mainly attributed to interdiffusion. By passivating the Si with nitrogen or oxygen, the Ru thickness for closing the layer can be reduced to 3 nm or even 1.7 nm on SiNx or SiO2, respectively. The diffusion kinetics and in-depth diffusion profiles of Ru deposited on Si, SiNx and SiO2 have been derived.",
keywords = "METIS-314618",
author = "{Coloma Ribera}, R. and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Sturm, {Jacobus Marinus} and Andrey Yakshin and Frederik Bijkerk",
year = "2016",
month = "1",
day = "19",
language = "English",
pages = "--",
note = "Physics@FOM Veldhoven 2016, FOM ; Conference date: 20-01-2016 Through 20-01-2016",

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Coloma Ribera, R, van de Kruijs, RWE, Sturm, JM, Yakshin, A & Bijkerk, F 2016, 'Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)' Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands, 20/01/16 - 20/01/16, pp. -.

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS). / Coloma Ribera, R.; van de Kruijs, Robbert Wilhelmus Elisabeth; Sturm, Jacobus Marinus; Yakshin, Andrey; Bijkerk, Frederik.

2016. - Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

AU - Coloma Ribera, R.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Sturm, Jacobus Marinus

AU - Yakshin, Andrey

AU - Bijkerk, Frederik

PY - 2016/1/19

Y1 - 2016/1/19

N2 - Thin ruthenium films are used in several applications such as catalysis, electronics and optical coatings. Due to its low-oxidation properties, Ru films are suitable as bottom electrodes in capacitors or as capping layer for extreme ultraviolet lithography optics. For both applications, it is important that the Ru layer is fully closed in order to prevent oxidation of the underlying material, which can cause a performance failure. We monitored magnetron sputter deposition of Ru on Si, SiNx and SiO2 thin films by in vacuo Low Energy Ion Scattering. On top of Si 4.4 nm of Ru is needed to close the layer, which is mainly attributed to interdiffusion. By passivating the Si with nitrogen or oxygen, the Ru thickness for closing the layer can be reduced to 3 nm or even 1.7 nm on SiNx or SiO2, respectively. The diffusion kinetics and in-depth diffusion profiles of Ru deposited on Si, SiNx and SiO2 have been derived.

AB - Thin ruthenium films are used in several applications such as catalysis, electronics and optical coatings. Due to its low-oxidation properties, Ru films are suitable as bottom electrodes in capacitors or as capping layer for extreme ultraviolet lithography optics. For both applications, it is important that the Ru layer is fully closed in order to prevent oxidation of the underlying material, which can cause a performance failure. We monitored magnetron sputter deposition of Ru on Si, SiNx and SiO2 thin films by in vacuo Low Energy Ion Scattering. On top of Si 4.4 nm of Ru is needed to close the layer, which is mainly attributed to interdiffusion. By passivating the Si with nitrogen or oxygen, the Ru thickness for closing the layer can be reduced to 3 nm or even 1.7 nm on SiNx or SiO2, respectively. The diffusion kinetics and in-depth diffusion profiles of Ru deposited on Si, SiNx and SiO2 have been derived.

KW - METIS-314618

M3 - Poster

SP - -

ER -

Coloma Ribera R, van de Kruijs RWE, Sturm JM, Yakshin A, Bijkerk F. Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS). 2016. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.