Growth of oblique sputtered Co and CoCrPt thin films for high-density tape recording

L.T. Nguyen, F.D. Tichelaar, J.C. Lodder

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    8 Citations (Scopus)


    In this paper, we report the properties of Co/Cr and CoCrPt/CoCrMn thin films grown by oblique sputtering onto polymer substrates. It is observed that in both cases, the underlayers promote the formation of HCP-structure of the magnetic layers, which results in a high magnetic anisotropy of the films consequently, high coercivities of 200 and 300 kA/m are obtained in the 20nm Co/180nm Cr and 30nm CoCrPt/50nm CoCrMn films, respectively. However, in the case of Co/Cr film, Co grains are relatively large and elongated following the transverse direction while in the case of CoCrPt/CoCrMn film, a tiny columnar structure inclined toward the incident direction is observed. This fact results in a different magnetic behavior of these films.
    Original languageUndefined
    Pages (from-to)1294-1297
    Number of pages4
    JournalJournal of magnetism and magnetic materials
    Issue number2005
    Publication statusPublished - 2005


    • EWI-5601
    • SMI-TST: From 2006 in EWI-TST
    • Thin Films
    • Sputtering
    • Magnetic recording media
    • Magnetic anisotropy
    • IR-63017
    • METIS-225252

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