Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

B. Van Hao, Alexeij Y. Kovalgin, Robertus A.M. Wolters

    Research output: Contribution to journal › Article › Academic › peer-review

    14 Citations (Scopus)
    1 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Growth of sub-nanometer thin continuous TiN films by atomic layer deposition'. Together they form a unique fingerprint.