Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology

Yiyuan Zhao*, Henk-Willem Veltkamp, Thomas V.P. Schut, Remco G.P. Sanders, Bogdan Breazu, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink, Joost C. Lötters

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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