Abstract
We propose a novel method to detect and correct drift in non-raster scanning probe microscopy. In conventional raster scanning drift is usually corrected by subtracting a fitted polynomial from each scan line, but sample tilt or large topographic features can result in severe artifacts. Our method uses self-intersecting scan paths to distinguish drift from topographic features. Observing the height differences when passing the same position at different times enables the reconstruction of a continuous function of drift. We show that a small number of self-intersections is adequate for automatic and reliable drift correction. Additionally, we introduce a fitness function which provides a quantitative measure of drift correctability for any arbitrary scan shape.
Original language | Undefined |
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Pages (from-to) | 48-54 |
Number of pages | 7 |
Journal | Ultramicroscopy |
Volume | 137 |
DOIs | |
Publication status | Published - Feb 2014 |
Keywords
- EWI-25596
- Atomic Force Microscopy
- Drift correction
- Mathematical imaging
- Non-raster scan
- METIS-309828
- IR-93779
- Self-intersecting scan