@inbook{0475be4bb06145ca922f7681cea3957c,
title = "Helium Ion Microscopy",
abstract = "The realization of a practical helium gas field ionization source (GFIS) enabled helium ion microscopy (HIM) as a new technique to image and modify materials and microstructures. After a brief overview of most common ultra-microscopy techniques (TEM, SEM, Gallium FIB) and HIM, we introduce the interaction fundamentals of helium ions with matter. A key element of that interaction is that the resulting signals for imaging, nanofabrication and analysis, i.e. the secondary electrons and backscattered ions, are to a very high degree localized around the incidence point of the helium beam. This simple fact allows the helium ion microscope to enable a new and unique view of surfaces and provide a new method for material modification. We highlight several applications for imaging and nanofabrication using the sub-nanometer sized helium probe of the HIM.",
keywords = "METIS-296590, IR-89927, Mean Free Path, Secondary Electron Yield, Secondary Electron Signal, Backscatter Yield, Transmission Electron Microscopy Lamella",
author = "Maas, {Diederik J.} and {van Gastel}, Raoul",
year = "2013",
doi = "10.1007/978-3-642-34243-1_16",
language = "English",
isbn = "978-3-642-34242-4",
series = "Springer Series in Surface Sciences",
publisher = "Springer",
pages = "461--497",
editor = "Gianangelo Bracco and Bodil Holst",
booktitle = "Surface Sciences Techniques",
address = "Germany",
}
