HF Anodic etching: a new tool for micromachining of silicon

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
    Duration: 19 Nov 199120 Nov 1991

    Conference

    ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
    CountryNetherlands
    CityVeldhoven
    Period19/11/9120/11/91

    Keywords

    • METIS-117923

    Cite this

    Gardeniers, J. G. E., & Eijkel, C. J. M. (1991). HF Anodic etching: a new tool for micromachining of silicon. -. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.