HF Anodic etching: a new tool for micromachining of silicon

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
    Duration: 19 Nov 199120 Nov 1991

    Conference

    ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
    CountryNetherlands
    CityVeldhoven
    Period19/11/9120/11/91

    Keywords

    • METIS-117923

    Cite this

    Gardeniers, J. G. E., & Eijkel, C. J. M. (1991). HF Anodic etching: a new tool for micromachining of silicon. -. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.
    Gardeniers, Johannes G.E. ; Eijkel, C.J.M. / HF Anodic etching: a new tool for micromachining of silicon. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.
    @conference{06e9df2089954c45871d422303a7f7e4,
    title = "HF Anodic etching: a new tool for micromachining of silicon",
    keywords = "METIS-117923",
    author = "Gardeniers, {Johannes G.E.} and C.J.M. Eijkel",
    year = "1991",
    month = "11",
    day = "19",
    language = "English",
    pages = "--",
    note = "IOP/FOM Werkgemeenschap Halfgeleiders 1991 ; Conference date: 19-11-1991 Through 20-11-1991",

    }

    Gardeniers, JGE & Eijkel, CJM 1991, 'HF Anodic etching: a new tool for micromachining of silicon' IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands, 19/11/91 - 20/11/91, pp. -.

    HF Anodic etching: a new tool for micromachining of silicon. / Gardeniers, Johannes G.E.; Eijkel, C.J.M.

    1991. - Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - HF Anodic etching: a new tool for micromachining of silicon

    AU - Gardeniers, Johannes G.E.

    AU - Eijkel, C.J.M.

    PY - 1991/11/19

    Y1 - 1991/11/19

    KW - METIS-117923

    M3 - Poster

    SP - -

    ER -

    Gardeniers JGE, Eijkel CJM. HF Anodic etching: a new tool for micromachining of silicon. 1991. Poster session presented at IOP/FOM Werkgemeenschap Halfgeleiders 1991, Veldhoven, Netherlands.