HF Anodic etching: a new tool for micromachining of silicon

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 19 Nov 1991
Event	IOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands Duration: 19 Nov 1991 → 20 Nov 1991

Conference	IOP/FOM Werkgemeenschap Halfgeleiders 1991
Country/Territory	Netherlands
City	Veldhoven
Period	19/11/91 → 20/11/91

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@conference{06e9df2089954c45871d422303a7f7e4,

title = "HF Anodic etching: a new tool for micromachining of silicon",

keywords = "METIS-117923",

author = "Gardeniers, \{Johannes G.E.\} and C.J.M. Eijkel",

year = "1991",

month = nov,

day = "19",

language = "English",

pages = "--",

note = "IOP/FOM Werkgemeenschap Halfgeleiders 1991 ; Conference date: 19-11-1991 Through 20-11-1991",

}