High aspect ratio trench etching

Henricus V. Jansen, Meint J. de Boer, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114723

    Cite this

    Jansen, H. V., de Boer, M. J., & Elwenspoek, M. C. (1996, Jun 5). High aspect ratio trench etching. Dish Hotel, Enschede.