| Original language | Undefined |
|---|---|
| Place of Publication | Dish Hotel, Enschede |
| Publication status | Published - 5 Jun 1996 |
Keywords
- METIS-114723
High aspect ratio trench etching
Henricus V. Jansen, Meint J. de Boer, Michael Curt Elwenspoek
Research output: Other contribution › Other research output