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High energy implanted transistor fabrication
J. Middelhoek
Research output
:
Contribution to journal
›
Article
›
Academic
3
Citations (Scopus)
269
Downloads (Pure)
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Engineering & Materials Science
Multiprocessing programs
100%
Ion implantation
60%
Lithography
49%
Transistors
38%
Silicon
35%
Fabrication
33%
Hot Temperature
21%
Physics & Astronomy
transistors
35%
fabrication
27%
ion implantation
20%
implantation
20%
lithography
18%
energy
13%
cross sections
13%
silicon
12%
simulation
8%
Chemistry
Ion Implantation
27%
Energy
21%
Simulation
14%