High energy ion implantation for merged silicon technologies

R.C.M. Wijburg

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Middelhoek, J., Supervisor
    • Wallinga, Hans, Supervisor
    • Mouthaan, A.J., Advisor
    Award date31 Aug 1990
    Place of PublicationEnschede
    Print ISBNs90-9003627-X
    Publication statusPublished - 31 Aug 1990

    Keywords

    • METIS-111429

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