High energy low-dose implanted silicon annealed by transient RTA

I. Barsony, J.L.P. Heideman, J. Middelhoek, Hans Wallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings symposium Mat.Res. Soc.
Pages	277-282
Number of pages	0
Publication status	Published - 1 Sept 1991

Keywords

@inproceedings{9c33552c8d1c43f08976a70d98a816a6,

title = "High energy low-dose implanted silicon annealed by transient RTA",

keywords = "METIS-114014",

author = "I. Barsony and J.L.P. Heideman and J. Middelhoek and Hans Wallinga",

year = "1991",

month = sep,

day = "1",

language = "Undefined",

pages = "277--282",

booktitle = "Proceedings symposium Mat.Res. Soc.",

}