@inproceedings{937ba270f4544da0b815c939acfcd314,
title = "High finesse vertically coupled waveguide-microring resonators based on Si3NA-SiO2 technology",
abstract = "A simple waveguiding structure with vertically coupled microring resonators has been realized. A finesse of more than 100 could be achieved by using Si/sub 3/N/sub 4/-SiO/sub 2/ technology. The devices have been realized by means of standard optical lithography processes and reactive ion etching (RIE).",
keywords = "IR-44054, METIS-208287",
author = "F.S. Tan and D.J.W. Klunder and H. Kelderman and Hugo Hoekstra and A. Driessen",
year = "2002",
month = jun,
day = "5",
doi = "10.1109/FOPC.2002.1015832",
language = "English",
isbn = "0-7803-7556-4",
publisher = "IEEE",
pages = "228--232",
booktitle = "Proceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components",
address = "United States",
note = "IEEE/LEOS Workshop on Fibre and Optical Passive Components, WFOPC 2002, WFOPC ; Conference date: 05-06-2002 Through 06-06-2002",
}