High finesse vertically coupled waveguide-microring resonators based on Si3NA-SiO2 technology

F.S. Tan, D.J.W. Klunder, H. Kelderman, Hugo Hoekstra, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)

    Abstract

    A simple waveguiding structure with vertically coupled microring resonators has been realized. A finesse of more than 100 could be achieved by using Si/sub 3/N/sub 4/-SiO/sub 2/ technology. The devices have been realized by means of standard optical lithography processes and reactive ion etching (RIE).
    Original languageEnglish
    Title of host publicationProceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components
    PublisherIEEE
    Pages228-232
    Number of pages5
    ISBN (Print)0-7803-7556-4
    DOIs
    Publication statusPublished - 5 Jun 2002
    EventIEEE/LEOS Workshop on Fibre and Optical Passive Components, WFOPC 2002 - University of Glasgow, Glasgow, United Kingdom
    Duration: 5 Jun 20026 Jun 2002

    Publication series

    Name
    PublisherIEEE

    Conference

    ConferenceIEEE/LEOS Workshop on Fibre and Optical Passive Components, WFOPC 2002
    Abbreviated titleWFOPC
    CountryUnited Kingdom
    CityGlasgow
    Period5/06/026/06/02

    Keywords

    • IR-44054
    • METIS-208287

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