High force 10 kN piezoresistive silicon force sensor with output independent of force distribution

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Johan W. Berenschot, Meint J. de Boer, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    24 Downloads (Pure)

    Fingerprint Dive into the research topics of 'High force 10 kN piezoresistive silicon force sensor with output independent of force distribution'. Together they form a unique fingerprint.