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High force 10 kN piezoresistive silicon force sensor with output independent of force distribution
A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Johan W. Berenschot, Meint J. de Boer, Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review