High frequency pressure oscillator for microcryocoolers

Srinivas Vanapalli, Hermanus J.M. ter Brake, Henricus V. Jansen, Yiping Zhao, Herman J. Holland, Johannes Faas Burger, Michael Curt Elwenspoek

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Microminiature pulse tube cryocoolers should operate at a frequency of an order higher than the conventional macro ones because the pulse tube cryocooler operating frequency scales inversely with the square of the pulse tube diameter. In this paper, the design and experiments of a high frequency pressure oscillator is presented with the aim to power a micropulse tube cryocooler operating between 300 and 80 K, delivering a cooling power of 10 mW. Piezoelectric actuators operate efficiently at high frequencies and have high power density making them good candidates as drivers for high frequency pressure oscillator. The pressure oscillator described in this work consists of a membrane driven by a piezoelectric actuator. A pressure ratio of about 1.11 was achieved with a filling pressure of 2.5 MPa and compression volume of about 22.6 mm3 when operating the actuator with a peak-to-peak sinusoidal voltage of 100 V at a frequency of 1 kHz. The electrical power input was 2.73 W. The high pressure ratio and low electrical input power at high frequencies would herald development of microminiature cryocoolers.
Original languageUndefined
Article number10.1063/1.2906229
Pages (from-to)045103
Number of pages6
JournalReview of scientific instruments
Issue number08332/4
Publication statusPublished - 2008


  • METIS-252132
  • IR-65150
  • EWI-14254

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