High line density free-standing transmission gratings for EUV emission spectroscopy

Hubertus M.J. Bastiaens, R. van der Meer, B. Vratzov, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 30 Sep 2012
EventInternational Symposium on Extreme Lithography - Brussels, Belgium
Duration: 30 Sep 20124 Oct 2012

Conference

ConferenceInternational Symposium on Extreme Lithography
CityBrussels, Belgium
Period30/09/124/10/12

Keywords

  • METIS-293951

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