High line density free-standing transmission gratings for EUV emission spectroscopy

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 30 Sept 2012
Event	International Symposium on Extreme Lithography - Brussels, Belgium Duration: 30 Sept 2012 → 4 Oct 2012

Conference	International Symposium on Extreme Lithography
City	Brussels, Belgium
Period	30/09/12 → 4/10/12

Keywords

@conference{d96bc71734f640e5a398e440accb6d1d,

title = "High line density free-standing transmission gratings for EUV emission spectroscopy",

keywords = "METIS-293951",

author = "Bastiaens, {Hubertus M.J.} and {van der Meer}, R. and B. Vratzov and Frederik Bijkerk",

year = "2012",

month = sep,

day = "30",

language = "English",

pages = "--",

note = "International Symposium on Extreme Lithography ; Conference date: 30-09-2012 Through 04-10-2012",

}