High-performance 90°hybrids based on MMI couplers in Si3N4 technology

Jia Yu, Jinfeng Mu, Kaixuan Chen, Michiel de Goede, Meindert Dijkstra, Sailing He*, Sonia M. García-Blanco

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
43 Downloads (Pure)


Low-loss, broadband, and low phase deviation optical 90°hybrids based on 2 × 4 multimode interference couplers are firstly demonstrated using Si3N4 on SiO2 technology. Only a simple traditional design method of MMI based on self-imaging theory and a single-stripe Si3N4 waveguide geometry with only one step etching process are utilized. The characterization of the fabricated devices is carried out over a wide spectral window of 1520–1610 nm, showing that the measured phase error is less than 8°, and common-mode rejection ratios (CMRRs) are better than −20 dB. The measured total loss of the fabricated device including a 90°hybrid and a 3-dB coupler is <1 dB in a bandwidth over 80 nm. Our analysis also shows large fabrication tolerance with width of ±0.1μm or length of ±3μm.

Original languageEnglish
Article number125620
JournalOptics communications
Early online date27 Feb 2020
Publication statusPublished - 15 Jun 2020


  • Integrated optics
  • Multimode interference (MMI) coupler
  • Optical 90°hybrid
  • Silicon nitride (SiN)
  • Optical 90 degrees hybrid
  • Silicon nitride (Si3N4)
  • UT-Hybrid-D
  • 22/2 OA procedure


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