TY - JOUR
T1 - High-performance 90°hybrids based on MMI couplers in Si3N4 technology
AU - Yu, Jia
AU - Mu, Jinfeng
AU - Chen, Kaixuan
AU - de Goede, Michiel
AU - Dijkstra, Meindert
AU - He, Sailing
AU - García-Blanco, Sonia M.
PY - 2020/6/15
Y1 - 2020/6/15
N2 - Low-loss, broadband, and low phase deviation optical 90°hybrids based on 2 × 4 multimode interference couplers are firstly demonstrated using Si3N4 on SiO2 technology. Only a simple traditional design method of MMI based on self-imaging theory and a single-stripe Si3N4 waveguide geometry with only one step etching process are utilized. The characterization of the fabricated devices is carried out over a wide spectral window of 1520–1610 nm, showing that the measured phase error is less than 8°, and common-mode rejection ratios (CMRRs) are better than −20 dB. The measured total loss of the fabricated device including a 90°hybrid and a 3-dB coupler is <1 dB in a bandwidth over 80 nm. Our analysis also shows large fabrication tolerance with width of ±0.1μm or length of ±3μm.
AB - Low-loss, broadband, and low phase deviation optical 90°hybrids based on 2 × 4 multimode interference couplers are firstly demonstrated using Si3N4 on SiO2 technology. Only a simple traditional design method of MMI based on self-imaging theory and a single-stripe Si3N4 waveguide geometry with only one step etching process are utilized. The characterization of the fabricated devices is carried out over a wide spectral window of 1520–1610 nm, showing that the measured phase error is less than 8°, and common-mode rejection ratios (CMRRs) are better than −20 dB. The measured total loss of the fabricated device including a 90°hybrid and a 3-dB coupler is <1 dB in a bandwidth over 80 nm. Our analysis also shows large fabrication tolerance with width of ±0.1μm or length of ±3μm.
KW - Integrated optics
KW - Multimode interference (MMI) coupler
KW - Optical 90°hybrid
KW - Silicon nitride (SiN)
KW - Optical 90 degrees hybrid
KW - Silicon nitride (Si3N4)
KW - UT-Hybrid-D
KW - 22/2 OA procedure
UR - http://www.scopus.com/inward/record.url?scp=85080143143&partnerID=8YFLogxK
U2 - 10.1016/j.optcom.2020.125620
DO - 10.1016/j.optcom.2020.125620
M3 - Article
AN - SCOPUS:85080143143
VL - 465
JO - Optics communications
JF - Optics communications
SN - 0030-4018
M1 - 125620
ER -