High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

Edin Sarajlic, Johan W. Berenschot, Niels Roelof Tas, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    23 Citations (Scopus)
    197 Downloads (Pure)


    We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 /spl mu/m /spl times/ 286 /spl mu/m, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was /spl plusmn/70 /spl mu/m, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34/spl middot/10/sup 9/ steps without any performance deterioration
    Original languageUndefined
    Title of host publicationProceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005
    Place of PublicationLos Alamitos
    Number of pages4
    ISBN (Print)0-7803-8994-8
    Publication statusPublished - Jun 2005
    Event13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of
    Duration: 5 Jun 20059 Jun 2005
    Conference number: 13

    Publication series



    Conference13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
    Abbreviated titleTRANSDUCERS
    Country/TerritoryKorea, Republic of


    • EWI-10275
    • METIS-224198
    • IR-52579

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