High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

Edin Sarajlic; Johan W. Berenschot; Niels Roelof Tas; H. Fujita; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2005.1496357

High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

Edin Sarajlic, Johan W. Berenschot, Niels Roelof Tas, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

23 Citations (Scopus)

255 Downloads (Pure)

Abstract

We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 /spl mu/m /spl times/ 286 /spl mu/m, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was /spl plusmn/70 /spl mu/m, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34/spl middot/10/sup 9/ steps without any performance deterioration

Original language	Undefined
Title of host publication	Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	53-56
Number of pages	4
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1496357
Publication status	Published - Jun 2005
Event	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 Conference number: 13

Publication series

Name
Publisher	IEEE
Number	05TH8791
Volume	1

Conference

Conference	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
Abbreviated title	TRANSDUCERS
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

EWI-10275
METIS-224198
IR-52579

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/SENSOR.2005.1496357

Cite this

Sarajlic, E., Berenschot, J. W., Tas, N. R., Fujita, H., Krijnen, G. J. M., & Elwenspoek, M. C. (2005). High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005 (pp. 53-56). IEEE. https://doi.org/10.1109/SENSOR.2005.1496357

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title = "High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology",

abstract = "We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 /spl mu/m /spl times/ 286 /spl mu/m, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was /spl plusmn/70 /spl mu/m, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34/spl middot/10/sup 9/ steps without any performance deterioration",

keywords = "EWI-10275, METIS-224198, IR-52579",

author = "Edin Sarajlic and Berenschot, {Johan W.} and Tas, {Niels Roelof} and H. Fujita and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2005",

month = jun,

doi = "10.1109/SENSOR.2005.1496357",

language = "Undefined",

isbn = "0-7803-8994-8",

publisher = "IEEE",

number = "05TH8791",

pages = "53--56",

booktitle = "Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005",

address = "United States",

note = "13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 ; Conference date: 05-06-2005 Through 09-06-2005",

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Sarajlic, E, Berenschot, JW , Tas, NR, Fujita, H, Krijnen, GJM & Elwenspoek, MC 2005, High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. in Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. IEEE, Los Alamitos, pp. 53-56, 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496357

High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. / Sarajlic, Edin; Berenschot, Johan W.; Tas, Niels Roelof et al.
Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Los Alamitos: IEEE, 2005. p. 53-56.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

AU - Sarajlic, Edin

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - Fujita, H.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 13

PY - 2005/6

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N2 - We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 /spl mu/m /spl times/ 286 /spl mu/m, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was /spl plusmn/70 /spl mu/m, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34/spl middot/10/sup 9/ steps without any performance deterioration

AB - We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 /spl mu/m /spl times/ 286 /spl mu/m, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was /spl plusmn/70 /spl mu/m, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34/spl middot/10/sup 9/ steps without any performance deterioration

KW - EWI-10275

KW - METIS-224198

KW - IR-52579

U2 - 10.1109/SENSOR.2005.1496357

DO - 10.1109/SENSOR.2005.1496357

M3 - Conference contribution

SN - 0-7803-8994-8

SP - 53

EP - 56

BT - Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005

PB - IEEE

CY - Los Alamitos

T2 - 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005

Y2 - 5 June 2005 through 9 June 2005

ER -