High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

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Abstract

A sacrificial moulding fabrication technique was employed for manufacturing massively parallel (~6 million nanopores) electro-osmotic flow (EOF) pumps in silicon nitride (SiN). The technique enables for a membrane with a high pore density and well-controlled pore dimensions up to 100 nm wide and 1 μm long resulting in a high-throughput pump at low actuation voltages.
Original languageEnglish
Title of host publication23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences
Subtitle of host publicationuTAS 2019
PublisherThe Chemical and Biological Microsystems Society
Pages1188-1189
ISBN (Electronic)978-1-7334190-0-0
ISBN (Print)978-1-7334190-0-0
Publication statusPublished - 31 Oct 2020
Event23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019 - Congress Center Basel, Basel, Switzerland
Duration: 27 Oct 201931 Oct 2019
Conference number: 23
https://cbmsociety.org/microtas/microtas2019/

Conference

Conference23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019
Abbreviated titleMicroTAS 2019
CountrySwitzerland
CityBasel
Period27/10/1931/10/19
Internet address

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