High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

Lucas Johannes Kooijman; Yasser  Pordeli; Bernhard Yonathan van der Wel; Johan W. Berenschot; Jan C.T. Eijkel; Niels R. Tas

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

Lucas Johannes Kooijman
, Yasser Pordeli
, Bernhard Yonathan van der Wel
, Johan W. Berenschot
, Jan C.T. Eijkel
, Niels R. Tas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

175 Downloads (Pure)

Abstract

A sacrificial moulding fabrication technique was employed for manufacturing massively parallel (~6 million nanopores) electro-osmotic flow (EOF) pumps in silicon nitride (SiN). The technique enables for a membrane with a high pore density and well-controlled pore dimensions up to 100 nm wide and 1 μm long resulting in a high-throughput pump at low actuation voltages.

Original language	English
Title of host publication	23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences
Subtitle of host publication	uTAS 2019
Publisher	The Chemical and Biological Microsystems Society
Pages	1188-1189
ISBN (Electronic)	978-1-7334190-0-0
ISBN (Print)	978-1-7334190-0-0
Publication status	Published - 31 Oct 2020
Event	23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019 - Congress Center Basel, Basel, Switzerland Duration: 27 Oct 2019 → 31 Oct 2019 Conference number: 23 https://cbmsociety.org/microtas/microtas2019/

Conference

Conference	23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019
Abbreviated title	MicroTAS 2019
Country/Territory	Switzerland
City	Basel
Period	27/10/19 → 31/10/19
Internet address	https://cbmsociety.org/microtas/microtas2019/

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

22/3 OA procedure

Access to Document

Kooijman MicroTASFinal published version, 1.01 MBLicence: Taverne

Cite this

Kooijman, L. J., Pordeli, Y., van der Wel, B. Y., Berenschot, J. W., Eijkel, J. C. T., & Tas, N. R. (2020). High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019 (pp. 1188-1189). The Chemical and Biological Microsystems Society.

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title = "High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding",

abstract = "A sacrificial moulding fabrication technique was employed for manufacturing massively parallel (\textasciitilde{}6 million nanopores) electro-osmotic flow (EOF) pumps in silicon nitride (SiN). The technique enables for a membrane with a high pore density and well-controlled pore dimensions up to 100 nm wide and 1 μm long resulting in a high-throughput pump at low actuation voltages.",

keywords = "22/3 OA procedure",

author = "Kooijman, \{Lucas Johannes\} and Yasser Pordeli and \{van der Wel\}, \{Bernhard Yonathan\} and Berenschot, \{Johan W.\} and Eijkel, \{Jan C.T.\} and Tas, \{Niels R.\}",

year = "2020",

month = oct,

day = "31",

language = "English",

isbn = "978-1-7334190-0-0",

pages = "1188--1189",

booktitle = "23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences",

publisher = "The Chemical and Biological Microsystems Society",

note = "23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019, MicroTAS 2019 ; Conference date: 27-10-2019 Through 31-10-2019",

url = "https://cbmsociety.org/microtas/microtas2019/",

}

Kooijman, LJ, Pordeli, Y, van der Wel, BY, Berenschot, JW , Eijkel, JCT & Tas, NR 2020, High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. in 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019. The Chemical and Biological Microsystems Society, pp. 1188-1189, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019, Basel, Switzerland, 27/10/19.

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding. / Kooijman, Lucas Johannes; Pordeli, Yasser ; van der Wel, Bernhard Yonathan et al.
23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019. The Chemical and Biological Microsystems Society, 2020. p. 1188-1189.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

AU - Kooijman, Lucas Johannes

AU - Pordeli, Yasser

AU - van der Wel, Bernhard Yonathan

AU - Berenschot, Johan W.

AU - Eijkel, Jan C.T.

AU - Tas, Niels R.

N1 - Conference code: 23

PY - 2020/10/31

Y1 - 2020/10/31

N2 - A sacrificial moulding fabrication technique was employed for manufacturing massively parallel (~6 million nanopores) electro-osmotic flow (EOF) pumps in silicon nitride (SiN). The technique enables for a membrane with a high pore density and well-controlled pore dimensions up to 100 nm wide and 1 μm long resulting in a high-throughput pump at low actuation voltages.

AB - A sacrificial moulding fabrication technique was employed for manufacturing massively parallel (~6 million nanopores) electro-osmotic flow (EOF) pumps in silicon nitride (SiN). The technique enables for a membrane with a high pore density and well-controlled pore dimensions up to 100 nm wide and 1 μm long resulting in a high-throughput pump at low actuation voltages.

KW - 22/3 OA procedure

M3 - Conference contribution

SN - 978-1-7334190-0-0

SP - 1188

EP - 1189

BT - 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences

PB - The Chemical and Biological Microsystems Society

T2 - 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2019

Y2 - 27 October 2019 through 31 October 2019

ER -

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

Abstract

Conference

UN SDGs

Keywords

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Cite this