Original language | Undefined |
---|---|
Pages (from-to) | 387-394 |
Number of pages | 8 |
Journal | Journal of microelectromechanical systems |
Volume | 7 |
Issue number | 4 |
Publication status | Published - 1998 |
Keywords
- METIS-111837
M. Pedersen, Wouter Olthuis, Piet Bergveld
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | 387-394 |
Number of pages | 8 |
Journal | Journal of microelectromechanical systems |
Volume | 7 |
Issue number | 4 |
Publication status | Published - 1998 |