High-performance electrostatic inchworm microactuators for probe-based data storage

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 28 Feb 2005
    Event3rd International Probe Storage Workshop, IPSW 2005 - Zürich, Switzerland
    Duration: 28 Feb 20051 Mar 2005
    Conference number: 3

    Conference

    Conference3rd International Probe Storage Workshop, IPSW 2005
    Abbreviated titleIPSW III
    Country/TerritorySwitzerland
    CityZürich
    Period28/02/051/03/05

    Keywords

    • METIS-228616

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