High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application

L. Shi*, F. Sarubbi, S. N. Nihtianov, L. K. Nanver, T. L.M. Scholtes, F. Scholze

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

22 Citations (Scopus)

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Engineering & Materials Science