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High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology
Henk Willem Veltkamp, Yiyuan Zhao, Meint J. De Boer, Remco G.P. Sanders, Remco J. Wiegerink, Joost C. Lotters
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
3
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(Scopus)
80
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