High pressure check valve for application in a miniature cryogenic sorption cooler

Johannes Faas Burger, M.C. van der Wekken, Johan W. Berenschot, Herman J. Holland, Hermanus J.M. ter Brake, Horst Rogalla, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
183 Downloads (Pure)

Abstract

This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.
Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages183-188
Number of pages6
ISBN (Print)0-7803-5194-0
DOIs
Publication statusPublished - 17 Jan 1999
Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States
Duration: 17 Jan 199921 Jan 1999
Conference number: 12

Conference

Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated titleMEMS
CountryUnited States
CityOrlando
Period17/01/9921/01/99

Keywords

  • IR-15823
  • METIS-112705
  • EWI-13225

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