Abstract
This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.
Original language | English |
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Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 183-188 |
Number of pages | 6 |
ISBN (Print) | 0-7803-5194-0 |
DOIs | |
Publication status | Published - 17 Jan 1999 |
Event | 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12 |
Conference
Conference | 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 |
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Abbreviated title | MEMS |
Country/Territory | United States |
City | Orlando |
Period | 17/01/99 → 21/01/99 |
Keywords
- IR-15823
- METIS-112705
- EWI-13225