High pressure check valve for application in a miniature cryogenic sorption cooler

Johannes Faas Burger; M.C. van der Wekken; Johan W. Berenschot; Herman J. Holland; Hermanus J.M. ter Brake; Horst Rogalla; Johannes G.E. Gardeniers; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1999.746803

High pressure check valve for application in a miniature cryogenic sorption cooler

Johannes Faas Burger, M.C. van der Wekken, Johan W. Berenschot, Herman J. Holland, Hermanus J.M. ter Brake, Horst Rogalla, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)

308 Downloads (Pure)

Abstract

This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.

Original language	English
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	183-188
Number of pages	6
ISBN (Print)	0-7803-5194-0
DOIs	https://doi.org/10.1109/MEMSYS.1999.746803
Publication status	Published - 17 Jan 1999
Event	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12

Conference

Conference	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated title	MEMS
Country/Territory	United States
City	Orlando
Period	17/01/99 → 21/01/99

Keywords

IR-15823
METIS-112705
EWI-13225

Access to Document

10.1109/MEMSYS.1999.746803

Cite this

Burger, J. F., van der Wekken, M. C., Berenschot, J. W., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Gardeniers, J. G. E., & Elwenspoek, M. C. (1999). High pressure check valve for application in a miniature cryogenic sorption cooler. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 183-188). IEEE. https://doi.org/10.1109/MEMSYS.1999.746803

@inproceedings{134d1ab29ca545ebb295b01890663009,

title = "High pressure check valve for application in a miniature cryogenic sorption cooler",

abstract = "This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.",

keywords = "IR-15823, METIS-112705, EWI-13225",

author = "Burger, {Johannes Faas} and {van der Wekken}, M.C. and Berenschot, {Johan W.} and Holland, {Herman J.} and {ter Brake}, {Hermanus J.M.} and Horst Rogalla and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = jan,

day = "17",

doi = "10.1109/MEMSYS.1999.746803",

language = "English",

isbn = "0-7803-5194-0",

pages = "183--188",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, MEMS ; Conference date: 17-01-1999 Through 21-01-1999",

}

Burger, JF, van der Wekken, MC, Berenschot, JW , Holland, HJ , ter Brake, HJM, Rogalla, H, Gardeniers, JGE & Elwenspoek, MC 1999, High pressure check valve for application in a miniature cryogenic sorption cooler. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, pp. 183-188, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, Florida, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1999.746803

High pressure check valve for application in a miniature cryogenic sorption cooler. / Burger, Johannes Faas; van der Wekken, M.C.; Berenschot, Johan W. et al.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, 1999. p. 183-188.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - High pressure check valve for application in a miniature cryogenic sorption cooler

AU - Burger, Johannes Faas

AU - van der Wekken, M.C.

AU - Berenschot, Johan W.

AU - Holland, Herman J.

AU - ter Brake, Hermanus J.M.

AU - Rogalla, Horst

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 1999/1/17

Y1 - 1999/1/17

N2 - This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.

AB - This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application in a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.

KW - IR-15823

KW - METIS-112705

KW - EWI-13225

U2 - 10.1109/MEMSYS.1999.746803

DO - 10.1109/MEMSYS.1999.746803

M3 - Conference contribution

SN - 0-7803-5194-0

SP - 183

EP - 188

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999

Y2 - 17 January 1999 through 21 January 1999

ER -

High pressure check valve for application in a miniature cryogenic sorption cooler

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Keywords

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