High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom, E. Chmela, Johannes G.E. Gardeniers, Johan W. Berenschot, Michael Curt Elwenspoek, Albert van den Berg, R.P Tijssen

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationMontreux, Switserland
    Publication statusPublished - 28 Nov 2000

    Keywords

    • METIS-114836

    Cite this