High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom; E. Chmela; Johannes G.E. Gardeniers; Johan W. Berenschot; Michael Curt Elwenspoek; Albert van den Berg; R.P Tijssen

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom, E. Chmela, Johannes G.E. Gardeniers, Johan W. Berenschot, Michael Curt Elwenspoek, Albert van den Berg, R.P Tijssen

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Montreux, Switserland
Publication status	Published - 28 Nov 2000

Keywords

METIS-114836

Cite this

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A., & Tijssen, R. P. (2000, Nov 28). High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. Montreux, Switserland.

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title = "High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex",

keywords = "METIS-114836",

author = "M.T. Blom and E. Chmela and Gardeniers, {Johannes G.E.} and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert and R.P Tijssen",

year = "2000",

month = "11",

day = "28",

language = "Undefined",

type = "Other",

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TY - GEN

T1 - High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

AU - Blom, M.T.

AU - Chmela, E.

AU - Gardeniers, Johannes G.E.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

AU - Tijssen, R.P

PY - 2000/11/28

Y1 - 2000/11/28

KW - METIS-114836

M3 - Other contribution

CY - Montreux, Switserland

ER -