High-pressure, solvent-resistant microfluidic connections by local anodic bonding of kovar to pyrex

M.T. Blom; E. Chmela; Johannes G.E. Gardeniers; Johan W. Berenschot; R.P Tijssen; Michael Curt Elwenspoek; Albert van den Berg

High-pressure, solvent-resistant microfluidic connections by local anodic bonding of kovar to pyrex

M.T. Blom, E. Chmela, Johannes G.E. Gardeniers, Johan W. Berenschot, R.P Tijssen, Michael Curt Elwenspoek, Albert van den Berg

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 12 Oct 2000

Keywords

METIS-114830

Cite this

@misc{8d1cd5ed216542b68323c252349f26d5,

title = "High-pressure, solvent-resistant microfluidic connections by local anodic bonding of kovar to pyrex",

keywords = "METIS-114830",

author = "M.T. Blom and E. Chmela and Gardeniers, {Johannes G.E.} and Berenschot, {Johan W.} and R.P Tijssen and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",

year = "2000",

month = oct,

day = "12",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - High-pressure, solvent-resistant microfluidic connections by local anodic bonding of kovar to pyrex

AU - Blom, M.T.

AU - Chmela, E.

AU - Gardeniers, Johannes G.E.

AU - Berenschot, Johan W.

AU - Tijssen, R.P

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-114830

M3 - Other contribution

CY - Enschede

ER -