High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom, E. Chmela, Johannes G.E. Gardeniers, Johan W. Berenschot, Michael Curt Elwenspoek, Albert van den Berg, R.P Tijssen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MicroMechanics Europe (MME) 2000
Place of PublicationUppsala, Sweden
Pages-
Number of pages4
Publication statusPublished - 1 Oct 2000
Event11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden
Duration: 1 Oct 20003 Oct 2000
Conference number: 11

Conference

Conference11th MicroMechanics Europe Workshop, MME 2000
Abbreviated titleMME
CountrySweden
CityUppsala
Period1/10/003/10/00

Keywords

  • METIS-113073
  • IR-16188

Cite this

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A., & Tijssen, R. P. (2000). High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In Proceedings of MicroMechanics Europe (MME) 2000 (pp. -). Uppsala, Sweden.