High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom; E. Chmela; Johannes G.E. Gardeniers; Johan W. Berenschot; Michael Curt Elwenspoek; Albert van den Berg; R.P Tijssen

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom, E. Chmela, Johannes G.E. Gardeniers, Johan W. Berenschot, Michael Curt Elwenspoek, Albert van den Berg, R.P Tijssen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MicroMechanics Europe (MME) 2000
Place of Publication	Uppsala, Sweden
Pages	-
Number of pages	4
Publication status	Published - 1 Oct 2000
Event	11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden Duration: 1 Oct 2000 → 3 Oct 2000 Conference number: 11

Conference

Conference	11th MicroMechanics Europe Workshop, MME 2000
Abbreviated title	MME
Country/Territory	Sweden
City	Uppsala
Period	1/10/00 → 3/10/00

Keywords

METIS-113073
IR-16188

Cite this

@inproceedings{3050ff2688254bdb8c696bc124e25039,

title = "High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex",

keywords = "METIS-113073, IR-16188",

author = "M.T. Blom and E. Chmela and Gardeniers, {Johannes G.E.} and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert and R.P Tijssen",

year = "2000",

month = oct,

day = "1",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of MicroMechanics Europe (MME) 2000",

note = "11th MicroMechanics Europe Workshop, MME 2000 ; Conference date: 01-10-2000 Through 03-10-2000",

}

TY - GEN

T1 - High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

AU - Blom, M.T.

AU - Chmela, E.

AU - Gardeniers, Johannes G.E.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

AU - Tijssen, R.P

N1 - Conference code: 11

PY - 2000/10/1

Y1 - 2000/10/1

KW - METIS-113073

KW - IR-16188

M3 - Conference contribution

SP - -

BT - Proceedings of MicroMechanics Europe (MME) 2000

CY - Uppsala, Sweden

T2 - 11th MicroMechanics Europe Workshop, MME 2000

Y2 - 1 October 2000 through 3 October 2000

ER -