High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom; E. Chmela; Johannes G.E. Gardeniers; Johan W. Berenschot; Michael Curt Elwenspoek; Albert van den Berg; R.P Tijssen

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

M.T. Blom
, E. Chmela
, Johannes G.E. Gardeniers
, Johan W. Berenschot
, Michael Curt Elwenspoek
, Albert van den Berg
, R.P Tijssen

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Montreux, Switserland
Publication status	Published - 28 Nov 2000

Keywords

METIS-114836

Cite this

@misc{49351ae491064cdbad94691f235fe592,

title = "High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex",

keywords = "METIS-114836",

author = "M.T. Blom and E. Chmela and Gardeniers, \{Johannes G.E.\} and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\} and \{van den Berg\}, Albert and R.P Tijssen",

year = "2000",

month = nov,

day = "28",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

AU - Blom, M.T.

AU - Chmela, E.

AU - Gardeniers, Johannes G.E.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

AU - Tijssen, R.P

PY - 2000/11/28

Y1 - 2000/11/28

KW - METIS-114836

M3 - Other contribution

CY - Montreux, Switserland

ER -