High quality, Room temperature Gate Dielectrics for TFTs

I.G. Isai, Alexeij Y. Kovalgin, J. Holleman, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SAFE conference 2000
    Place of PublicationVeldhoven, The Netherlands
    Pages69-74
    Publication statusPublished - 29 Nov 2000

    Keywords

    • METIS-113909

    Cite this

    Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H., & Wallinga, H. (2000). High quality, Room temperature Gate Dielectrics for TFTs. In Proceedings of SAFE conference 2000 (pp. 69-74). Veldhoven, The Netherlands.