High quality, Room temperature Gate Dielectrics for TFTs

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of SAFE conference 2000
Place of Publication	Veldhoven, The Netherlands
Pages	69-74
Publication status	Published - 29 Nov 2000

Keywords

@inproceedings{f850e89a58b149f697f00a6d92abc39c,

title = "High quality, Room temperature Gate Dielectrics for TFTs",

keywords = "METIS-113909",

author = "I.G. Isai and Kovalgin, \{Alexeij Y.\} and J. Holleman and P.H. Woerlee and Hans Wallinga",

year = "2000",

month = nov,

day = "29",

language = "Undefined",

isbn = "9073461243",

pages = "69--74",

booktitle = "Proceedings of SAFE conference 2000",

}