High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

I.G. Isai, Alexeij Y. Kovalgin, J. Holleman, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationThin Film Transistor Technologies V
    Subtitle of host publicationproceedings of the international symposium
    Place of PublicationPennington, NJ
    Pages169-175
    Number of pages7
    Publication statusPublished - 23 Oct 2001
    Event5th Symposium on Thin Film Transistor Technologies, TFTT 2000 - Phoenix, United States
    Duration: 23 Oct 200025 Oct 2000
    Conference number: 5

    Publication series

    NameProceedings
    PublisherElectrochemical Society
    Volume2000-31

    Conference

    Conference5th Symposium on Thin Film Transistor Technologies, TFTT 2000
    Abbreviated titleTFTT
    CountryUnited States
    CityPhoenix
    Period23/10/0025/10/00

    Keywords

    • METIS-200745

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