High-rate a-Si: H for TFTs: a comparative study

H. Meiling, W.F. van der Weg, R.E.I. Schropp, J. Holleman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Thin Film Transistor Technologies III Conference
    Place of PublicationSt. Antonio, TX, U.S.A.
    Pages1-12
    Publication statusPublished - 6 Oct 1996

    Keywords

    • METIS-113858

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