High reflectance multilayers for EUVL HVM-projection optics

Eric Louis, E.D. van Hattum, S. Alonso van der Westen, P. Sallé, Kees Grootkarzijn, E. Zoethout, Frederik Bijkerk, G. von Blanckenhagen, Stephan Müllender

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

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Physics & Astronomy