High reflectance multilayers for EUVL HVM-projection optics
- Eric Louis
- , E.D. van Hattum
- , S. Alonso van der Westen
- , P. Sallé
- , Kees Grootkarzijn
- , E. Zoethout
- , Frederik Bijkerk
- , G. von Blanckenhagen
- , Stephan Müllender
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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