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High reflectance multilayers for EUVL HVM-projection optics
Eric Louis, E.D. van Hattum, S. Alonso van der Westen, P. Sallé, Kees Grootkarzijn, E. Zoethout, Frederik Bijkerk, G. von Blanckenhagen, Stephan Müllender
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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