High refractive index low-loss aluminium oxide waveguides

W.A.P.M. Hendriks*, M. Dijkstra (Contributor), C.I. van Emmerik (Contributor), Ivo Hegeman (Contributor), S.M. García Blanco (Contributor)

*Corresponding author for this work

Research output: Contribution to conferencePosterAcademic


A high refractive index (n~1.715 at 633 nm of wavelength) aluminium oxide slab waveguide has been developed, which exhibits very low losses from the near-UV to the near infrared wavelength range. Slab waveguide losses as low as 1.8 dB/cm at 407 nm and less than 0.1 dB/cm at 1550 nm of wavelength have been experimentally characterized. Such low losses are limited by surface scattering. The layer was deposited by reactive sputter coating with an aluminium target, a set substrate temperature of 700 C and an oxidation state of the target of 5 %. The very high optical quality of this material, in combination with rare-earth ion doping, could pave the way towards high-gain on-chip amplifiers in different wavelength ranges, on-chip lasers and non-linear applications.
Original languageEnglish
Publication statusPublished - Jun 2020
Event22nd European Conference on Integrated Optics, ECIO 2020 - Paris, France
Duration: 23 Jun 202025 Jun 2020
Conference number: 22


Conference22nd European Conference on Integrated Optics, ECIO 2020
Abbreviated titleECIO 2020
Internet address


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