High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography

X. Duan, Yiping Zhao, A. Perl, Johan W. Berenschot, David Reinhoudt, Jurriaan Huskens

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)
204 Downloads (Pure)

Abstract

Chemically patterned flat stamps provide an effective solution to avoid mechanical stamp-stability problems currently encountered in microcontact printing. A new method is developed to fabricate chemical patterns on a flat PDMS stamp using nanoimprint lithography. Sub-100 nm gold patterns are successfully replicated by these chemically patterned flat PDMS stamps.
Original languageEnglish
Article number10.1002/adma.200803809
Pages (from-to)2798-2802
Number of pages5
JournalAdvanced materials
Volume21
Issue number27
DOIs
Publication statusPublished - 10 Jul 2009

Keywords

  • EWI-16079
  • IR-67992
  • METIS-259871

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