High resolution imaging of dielectric surfaces with an evanescent field optical microscope

N.F. van Hulst; F.B. Segerink; B. Bölger

doi:10.1016/0030-4018(92)90461-Y

High resolution imaging of dielectric surfaces with an evanescent field optical microscope

N.F. van Hulst, F.B. Segerink, B. Bölger

Optical Sciences

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Abstract

An evanescent field optical microscope (EFOM) is presented which employs frustrated total internal reflection on a localized scale by scanning a dielectric tip in close proximity to a sample surface. High resolution images of dielectric gratings and spheres containing both topographic and dielectric information have been obtained. The resolution obtained is 30 nm in the lateral directions and 0.1 nm in height depending on proper tip fabrication

Original language	English
Pages (from-to)	212-218
Journal	Optics communications
Volume	87
Issue number	5-6
DOIs	https://doi.org/10.1016/0030-4018(92)90461-Y
Publication status	Published - 1992

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@article{8172a79c945a4e6697d401d0875ca799,

title = "High resolution imaging of dielectric surfaces with an evanescent field optical microscope",

abstract = "An evanescent field optical microscope (EFOM) is presented which employs frustrated total internal reflection on a localized scale by scanning a dielectric tip in close proximity to a sample surface. High resolution images of dielectric gratings and spheres containing both topographic and dielectric information have been obtained. The resolution obtained is 30 nm in the lateral directions and 0.1 nm in height depending on proper tip fabrication",

author = "{van Hulst}, N.F. and F.B. Segerink and B. B{\"o}lger",

year = "1992",

doi = "10.1016/0030-4018(92)90461-Y",

language = "English",

volume = "87",

pages = "212--218",

journal = "Optics communications",

issn = "0030-4018",

publisher = "Elsevier",

number = "5-6",

}

TY - JOUR

T1 - High resolution imaging of dielectric surfaces with an evanescent field optical microscope

AU - van Hulst, N.F.

AU - Segerink, F.B.

AU - Bölger, B.

PY - 1992

Y1 - 1992

N2 - An evanescent field optical microscope (EFOM) is presented which employs frustrated total internal reflection on a localized scale by scanning a dielectric tip in close proximity to a sample surface. High resolution images of dielectric gratings and spheres containing both topographic and dielectric information have been obtained. The resolution obtained is 30 nm in the lateral directions and 0.1 nm in height depending on proper tip fabrication

AB - An evanescent field optical microscope (EFOM) is presented which employs frustrated total internal reflection on a localized scale by scanning a dielectric tip in close proximity to a sample surface. High resolution images of dielectric gratings and spheres containing both topographic and dielectric information have been obtained. The resolution obtained is 30 nm in the lateral directions and 0.1 nm in height depending on proper tip fabrication

U2 - 10.1016/0030-4018(92)90461-Y

DO - 10.1016/0030-4018(92)90461-Y

M3 - Article

SN - 0030-4018

VL - 87

SP - 212

EP - 218

JO - Optics communications

JF - Optics communications

IS - 5-6

ER -

High resolution imaging of dielectric surfaces with an evanescent field optical microscope

Abstract

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