High resolution imaging of dielectric surfaces with an evanescent field optical microscope

N.F. van Hulst, F.B. Segerink, B. Bölger

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An evanescent field optical microscope (EFOM) is presented which employs frustrated total internal reflection o­n a localized scale by scanning a dielectric tip in close proximity to a sample surface. High resolution images of dielectric gratings and spheres containing both topographic and dielectric information have been obtained. The resolution obtained is 30 nm in the lateral directions and 0.1 nm in height depending o­n proper tip fabrication
Original languageEnglish
Pages (from-to)212-218
JournalOptics communications
Issue number5-6
Publication statusPublished - 1992


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