High-resolution integrated spectrometers in silicon-oxynitride

B.I. Akça, N. Ismail, F. Sun, A. Driessen, Kerstin Worhoff, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Arrayed waveguide grating spectrometers operating around 800 nm and 1300 nm are demonstrated, with the highest resolution (0.16 nm) and largest free spectral range (77 nm) achieved in silicon-oxynitride technology to date.
    Original languageUndefined
    Title of host publicationConference on Lasers and Electro-Optics, CLEO
    Place of PublicationWashington, DC
    PublisherOptical Society of America
    PagesJWA65
    Number of pages2
    ISBN (Print)978-1-55752-910-7
    Publication statusPublished - May 2011
    EventEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009 - Munich, Germany
    Duration: 22 May 201126 May 2011

    Publication series

    Name
    PublisherOptical Society of America

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
    Abbreviated titleCLEO-Europe/EQEC 2011
    CountryGermany
    CityMunich
    Period22/05/1126/05/11

    Keywords

    • METIS-277620
    • IR-77374
    • EWI-20115
    • Integrated Optics
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • Wavelength Filtering Devices

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