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High-resolution integrated spectrometers in silicon-oxynitride

  • B.I. Akça
  • , N. Ismail
  • , F. Sun
  • , A. Driessen
  • , Kerstin Worhoff
  • , Markus Pollnau
  • , R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    Arrayed waveguide grating spectrometers operating around 800 nm and 1300 nm are demonstrated, with the highest resolution (0.16 nm) and largest free spectral range (77 nm) achieved in silicon-oxynitride technology to date.
    Original languageUndefined
    Title of host publicationConference on Lasers and Electro-Optics, CLEO
    Place of PublicationWashington, DC
    PublisherOptical Society of America
    PagesJWA65
    Number of pages2
    ISBN (Print)978-1-55752-910-7
    Publication statusPublished - May 2011
    EventEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009: Explore Innovation. Build Applications. - Baltimore Convention Center, Munich, Germany
    Duration: 22 May 201126 May 2011

    Publication series

    Name
    PublisherOptical Society of America

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
    Abbreviated titleCLEO-Europe/EQEC 2011
    Country/TerritoryGermany
    CityMunich
    Period22/05/1126/05/11

    Keywords

    • METIS-277620
    • IR-77374
    • EWI-20115
    • Integrated Optics
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • Wavelength Filtering Devices

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