High resolution magnetic force microscopy using focussed ion beam modified tips

G.N. Phillips; Martin Herman Siekman; Leon Abelmann; J.C. Lodder

doi:10.1109/INTMAG.2002.1000808

High resolution magnetic force microscopy using focussed ion beam modified tips

G.N. Phillips
, Martin Herman Siekman
, Leon Abelmann
, J.C. Lodder

Research output: Contribution to conference › Paper

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Abstract

Summary form only given. Magnetic force microscopy (MFM) is well established for imaging surface magnetic stray fields. With commercial microscopes and magnetic tips, images with 50 nm resolution are quite routine; however, obtaining higher resolutions is experimentally more demanding. Higher resolution is required for imaging patterned magnetic elements and the latest magnetic media where bit lengths are less than 40 nm. Sub-30 nm resolution images of a 20 bilayer Co/sub 50/Ni/sub 50//Pt thin film have been obtained using Si tips coated with Co and modified by focused ion beam (FIB) milling. Imaging was performed at room temperature, in air, with a Digital Instruments D13100 MFM in tapping/lift mode.

Original language	Undefined
DOIs	https://doi.org/10.1109/INTMAG.2002.1000808
Publication status	Published - 2002
Event	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - RAI Congress Center, Amsterdam, Netherlands Duration: 28 Apr 2002 → 2 May 2002

Conference

Conference	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Abbreviated title	INTERMAG Europe 2002
Country/Territory	Netherlands
City	Amsterdam
Period	28/04/02 → 2/05/02

Keywords

IR-55897

Access to Document

10.1109/INTMAG.2002.1000808

01000808

Cite this

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title = "High resolution magnetic force microscopy using focussed ion beam modified tips",

abstract = "Summary form only given. Magnetic force microscopy (MFM) is well established for imaging surface magnetic stray fields. With commercial microscopes and magnetic tips, images with 50 nm resolution are quite routine; however, obtaining higher resolutions is experimentally more demanding. Higher resolution is required for imaging patterned magnetic elements and the latest magnetic media where bit lengths are less than 40 nm. Sub-30 nm resolution images of a 20 bilayer Co/sub 50/Ni/sub 50//Pt thin film have been obtained using Si tips coated with Co and modified by focused ion beam (FIB) milling. Imaging was performed at room temperature, in air, with a Digital Instruments D13100 MFM in tapping/lift mode.",

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author = "G.N. Phillips and Siekman, \{Martin Herman\} and Leon Abelmann and J.C. Lodder",

year = "2002",

doi = "10.1109/INTMAG.2002.1000808",

language = "Undefined",

note = "2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 ; Conference date: 28-04-2002 Through 02-05-2002",

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T1 - High resolution magnetic force microscopy using focussed ion beam modified tips

AU - Phillips, G.N.

AU - Siekman, Martin Herman

AU - Abelmann, Leon

AU - Lodder, J.C.

PY - 2002

Y1 - 2002

N2 - Summary form only given. Magnetic force microscopy (MFM) is well established for imaging surface magnetic stray fields. With commercial microscopes and magnetic tips, images with 50 nm resolution are quite routine; however, obtaining higher resolutions is experimentally more demanding. Higher resolution is required for imaging patterned magnetic elements and the latest magnetic media where bit lengths are less than 40 nm. Sub-30 nm resolution images of a 20 bilayer Co/sub 50/Ni/sub 50//Pt thin film have been obtained using Si tips coated with Co and modified by focused ion beam (FIB) milling. Imaging was performed at room temperature, in air, with a Digital Instruments D13100 MFM in tapping/lift mode.

AB - Summary form only given. Magnetic force microscopy (MFM) is well established for imaging surface magnetic stray fields. With commercial microscopes and magnetic tips, images with 50 nm resolution are quite routine; however, obtaining higher resolutions is experimentally more demanding. Higher resolution is required for imaging patterned magnetic elements and the latest magnetic media where bit lengths are less than 40 nm. Sub-30 nm resolution images of a 20 bilayer Co/sub 50/Ni/sub 50//Pt thin film have been obtained using Si tips coated with Co and modified by focused ion beam (FIB) milling. Imaging was performed at room temperature, in air, with a Digital Instruments D13100 MFM in tapping/lift mode.

KW - IR-55897

U2 - 10.1109/INTMAG.2002.1000808

DO - 10.1109/INTMAG.2002.1000808

M3 - Paper

T2 - 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002

Y2 - 28 April 2002 through 2 May 2002

ER -