High resolution powder blast micromachining

H. Wensink, Johan W. Berenschot, Henricus V. Jansen, Michael Curt Elwenspoek

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    89 Citations (Scopus)
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    Abstract

    Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 µm particles (compared with 30 µm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 µm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages769-774
    Number of pages6
    ISBN (Print)0-7803-5273-4
    DOIs
    Publication statusPublished - 23 Jan 2000
    Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
    Duration: 23 Jan 200027 Jan 2000
    Conference number: 13

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
    Abbreviated titleMEMS
    CountryJapan
    CityMiyazaki
    Period23/01/0027/01/00

    Keywords

    • METIS-113066
    • EWI-13185
    • IR-16181

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