High resolution powder blast micromachining

H. Wensink; Johan W. Berenschot; Henricus V. Jansen; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2000.838615

High resolution powder blast micromachining

H. Wensink, Johan W. Berenschot, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

102 Citations (Scopus)

306 Downloads (Pure)

Abstract

Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 µm particles (compared with 30 µm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 µm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	769-774
Number of pages	6
ISBN (Print)	0-7803-5273-4
DOIs	https://doi.org/10.1109/MEMSYS.2000.838615
Publication status	Published - 23 Jan 2000
Event	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13

Publication series

Name
Publisher	IEEE

Conference

Conference	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated title	MEMS
Country/Territory	Japan
City	Miyazaki
Period	23/01/00 → 27/01/00

Keywords

METIS-113066
EWI-13185
IR-16181

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2000.838615

Cite this

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title = "High resolution powder blast micromachining",

abstract = "Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 µm particles (compared with 30 µm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 µm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.",

keywords = "METIS-113066, EWI-13185, IR-16181",

author = "H. Wensink and Berenschot, {Johan W.} and Jansen, {Henricus V.} and Elwenspoek, {Michael Curt}",

year = "2000",

month = jan,

day = "23",

doi = "10.1109/MEMSYS.2000.838615",

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isbn = "0-7803-5273-4",

publisher = "IEEE",

pages = "769--774",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

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note = "13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 ; Conference date: 23-01-2000 Through 27-01-2000",

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T1 - High resolution powder blast micromachining

AU - Wensink, H.

AU - Berenschot, Johan W.

AU - Jansen, Henricus V.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 13

PY - 2000/1/23

Y1 - 2000/1/23

N2 - Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 µm particles (compared with 30 µm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 µm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.

AB - Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 µm particles (compared with 30 µm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 µm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.

KW - METIS-113066

KW - EWI-13185

KW - IR-16181

U2 - 10.1109/MEMSYS.2000.838615

DO - 10.1109/MEMSYS.2000.838615

M3 - Conference contribution

SN - 0-7803-5273-4

SP - 769

EP - 774

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000

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