High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through

G.J. Burger, E.J.T. Smulders, Johan W. Berenschot, Theodorus S.J. Lammerink, J.H.J. Fluitman, S. Imai

Research output: Other contribution › Other research output

Keywords

@misc{f4cfa8e197364decb45e824149a6f903,

title = "High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through",

keywords = "METIS-114932",

author = "G.J. Burger and E.J.T. Smulders and Berenschot, {Johan W.} and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman and S. Imai",

year = "1995",

month = jun,

day = "25",

language = "Undefined",

type = "Other",

}