High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through

G.J. Burger, E.J.T. Smulders, J.W. Berenschot, T.S.J. Lammerink, J.H.J. Fluitman, S. Imai

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    10 Citations (Scopus)
    774 Downloads (Pure)

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