High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers

B.I. Akça, N. Ismail, G. Sengo, F. Sun, Kerstin Worhoff, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) spectrometers operating around 800 nm and 1300 nm. A 100-channel AWG with 0.4 nm channel spacing centered at 1300 nm and a 125-channel AWG with 0.16 nm channel spacing centered at 800 nm have been fabricated and characterized. The measured crosstalk and insertion loss values near the central wavelengths were ranging between -22 and -32 dB and between 3.2 and 2 dB for 800-nm AWG and 1300-nm AWG, respectively. The highest wavelength resolution (0.16 nm) and the largest free spectral range value (38.8 nm) have been achieved in SiON technology so far.
    Original languageEnglish
    Title of host publicationProceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter
    EditorsJ. Pozo, M. Mortensen, P. Urbach, X Leijtens, M. Yousefi
    Place of PublicationDelft
    PublisherUitgeverij TNO
    Pages125-128
    Number of pages4
    ISBN (Print)978-90-78314-15-8
    Publication statusPublished - 2010
    Event15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands
    Duration: 18 Nov 201019 Nov 2010
    Conference number: 15

    Publication series

    Name
    PublisherUitgeverij TNO

    Conference

    Conference15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010
    CountryNetherlands
    CityDelft
    Period18/11/1019/11/10

    Keywords

    • IR-75723
    • EWI-19319
    • METIS-276754

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