High spectral purity microwave generation using a dual-frequency hybrid integrated semiconductor-dielectric waveguide laser

We present an integrated semiconductor-dielectric hybrid dual-frequency laser operating in the 1.5 μm wavelength range for microwave and terahertz (THz) generation. Generating a microwave beat frequency near 11 GHz, we observe an intrinsic linewidth as low as about 2 kHz. This is realized by hybrid integration of a single diode amplifier based on indium phosphide (InP) with a long, low-loss silicon nitride (Si₃N₄) feedback circuit to extend the cavity photon lifetime, resulting in a cavity optical roundtrip length of about 30 cm on a chip. Simultaneous lasing at two frequencies is enabled by introducing an external control parameter for balancing the feedback from two tunable, frequency-selective Vernier mirrors on the Si₃N₄ chip. Each frequency can be tuned with a wavelength coverage of about 80 nm, potentially allowing for the generation of a broad range of frequencies in the microwave range up to the THz range.