High-Tc bolometers with silicon-nitride spiderweb suspension for far-infrared detection

M.J.M.E. De Nivelle, M.P. Bruijn, P.A.J. de Korte, Stefan Sanchez, M. Elwenspoek, T. Heidenblut, B. Schwierzi, W. Michalke, E. Steinbeiss

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