High-temperature interaction of nitrogen with thin iron films: thermal desorption kinetics studies combined with microstructure analysis of Fe-N films

Enrico G. Keim; W.F. Lisowski; M.A. Smithers

High-temperature interaction of nitrogen with thin iron films: thermal desorption kinetics studies combined with microstructure analysis of Fe-N films

Enrico G. Keim
, W.F. Lisowski
, M.A. Smithers

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	545-552
Number of pages	8
Journal	Journal of vacuum science & technology A: vacuum, surfaces, and films
Volume	21
Issue number	3
Publication status	Published - 2003

Keywords

METIS-216093

Cite this

@article{ca258755727c4321afc8187f8edacd72,

title = "High-temperature interaction of nitrogen with thin iron films: thermal desorption kinetics studies combined with microstructure analysis of Fe-N films",

keywords = "METIS-216093",

author = "Keim, \{Enrico G.\} and W.F. Lisowski and M.A. Smithers",

year = "2003",

language = "Undefined",

volume = "21",

pages = "545--552",

journal = "Journal of vacuum science \& technology A: vacuum, surfaces, and films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3",

}

High-temperature interaction of nitrogen with thin iron films: thermal desorption kinetics studies combined with microstructure analysis of Fe-N films. / Keim, Enrico G.; Lisowski, W.F.; Smithers, M.A.
In: Journal of vacuum science & technology A: vacuum, surfaces, and films, Vol. 21, No. 3, 2003, p. 545-552.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - High-temperature interaction of nitrogen with thin iron films: thermal desorption kinetics studies combined with microstructure analysis of Fe-N films

AU - Keim, Enrico G.

AU - Lisowski, W.F.

AU - Smithers, M.A.

PY - 2003

Y1 - 2003

KW - METIS-216093

M3 - Article

SN - 0734-2101

VL - 21

SP - 545

EP - 552

JO - Journal of vacuum science & technology A: vacuum, surfaces, and films

JF - Journal of vacuum science & technology A: vacuum, surfaces, and films

IS - 3

ER -