Highly accurate flow measurements with thermal flow sensors using the alternating direction method

Michael J.A.M. van Putten; Maurice H.P.M. van Putten; Anton F.P. van Putten

doi:10.1109/IMTC.1996.507438

Highly accurate flow measurements with thermal flow sensors using the alternating direction method

Michael J.A.M. van Putten^*, Maurice H.P.M. van Putten, Anton F.P. van Putten

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

20 Downloads (Pure)

Abstract

A novel method to eliminate additive drift in silicon thermal flow sensors, the Alternating Direction Method, is presented. In this sensor design the flow signal is contained in the gradient of a two-dimensional temperature distribution on the chip. This temperature gradient is induced by the convective heat transfer of the flowing medium, which is overall dependent on the physical aspects of the flowing medium, the physical characteristics of the sensor, and the thermal coupling of the sensor to its holder and environment.

Original language	English
Title of host publication	Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec
Pages	527-530
Number of pages	4
DOIs	https://doi.org/10.1109/IMTC.1996.507438
Publication status	Published - 2002
Externally published	Yes
Event	Joint 1996 IEEE Instrumentation and Measurement Technology Conference & IMEKO Technical Committee - Brussels, Belgium Duration: 4 Jun 1996 → 6 Jun 1996

Conference

Conference	Joint 1996 IEEE Instrumentation and Measurement Technology Conference & IMEKO Technical Committee
Country/Territory	Belgium
City	Brussels
Period	4/06/96 → 6/06/96

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10.1109/IMTC.1996.507438

Highly_accurate_flow_measurements_with_thermal_flow_sensors_using_the_alternating_direction_methodFinal published version, 415 KB

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van Putten, M. J. A. M., van Putten, M. H. P. M., & van Putten, A. F. P. (2002). Highly accurate flow measurements with thermal flow sensors using the alternating direction method. In Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec (pp. 527-530) https://doi.org/10.1109/IMTC.1996.507438

van Putten, Michael J.A.M. ; van Putten, Maurice H.P.M. ; van Putten, Anton F.P. / Highly accurate flow measurements with thermal flow sensors using the alternating direction method. Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec. 2002. pp. 527-530

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title = "Highly accurate flow measurements with thermal flow sensors using the alternating direction method",

abstract = "A novel method to eliminate additive drift in silicon thermal flow sensors, the Alternating Direction Method, is presented. In this sensor design the flow signal is contained in the gradient of a two-dimensional temperature distribution on the chip. This temperature gradient is induced by the convective heat transfer of the flowing medium, which is overall dependent on the physical aspects of the flowing medium, the physical characteristics of the sensor, and the thermal coupling of the sensor to its holder and environment.",

author = "{van Putten}, {Michael J.A.M.} and {van Putten}, {Maurice H.P.M.} and {van Putten}, {Anton F.P.}",

year = "2002",

doi = "10.1109/IMTC.1996.507438",

language = "English",

pages = "527--530",

booktitle = "Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec",

note = "Joint 1996 IEEE Instrumentation and Measurement Technology Conference & IMEKO Technical Committee ; Conference date: 04-06-1996 Through 06-06-1996",

}

van Putten, MJAM, van Putten, MHPM & van Putten, AFP 2002, Highly accurate flow measurements with thermal flow sensors using the alternating direction method. in Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec. pp. 527-530, Joint 1996 IEEE Instrumentation and Measurement Technology Conference & IMEKO Technical Committee, Brussels, Belgium, 4/06/96. https://doi.org/10.1109/IMTC.1996.507438

Highly accurate flow measurements with thermal flow sensors using the alternating direction method. / van Putten, Michael J.A.M.; van Putten, Maurice H.P.M.; van Putten, Anton F.P.
Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec. 2002. p. 527-530.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - A novel method to eliminate additive drift in silicon thermal flow sensors, the Alternating Direction Method, is presented. In this sensor design the flow signal is contained in the gradient of a two-dimensional temperature distribution on the chip. This temperature gradient is induced by the convective heat transfer of the flowing medium, which is overall dependent on the physical aspects of the flowing medium, the physical characteristics of the sensor, and the thermal coupling of the sensor to its holder and environment.

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BT - Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec

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van Putten MJAM, van Putten MHPM, van Putten AFP. Highly accurate flow measurements with thermal flow sensors using the alternating direction method. In Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec. 2002. p. 527-530 doi: 10.1109/IMTC.1996.507438

Highly accurate flow measurements with thermal flow sensors using the alternating direction method

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