Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Yiyuan Zhao, Henk-Willem Veltkamp, Thomas Victor Paul Schut, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Contribution to conferencePaperAcademic

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Abstract

Surface Channel Technology is widely used as the fabrication process to make free-hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes between the adjacent free-hanging microfluidic channels using the SCT process. Essentially, two parameters are used to tune the final cross-sectional geometry and size of the bulk silicon electrodes. One is the distance between two adjacent rows of slits and the other is the width of flat membrane above the microchannels. The advantageous physical features make bulk silicon electrodes suitable for many sensing and actuation applications. When the bulk silicon electrodes are used as microheaters, they allow higher power dissipation. This is because of their larger cross-sectional areas compared to the commonly used thin film metal microheaters. Moreover, as sensing electrodes, bulk silicon electrodes are located between the sidewalls of two adjacent microchannels. This makes them applicable as the sidewall resistive or capacitive readout in e.g. flow sensors.
Original languageEnglish
Pages116-119
Number of pages4
Publication statusPublished - 2 Oct 2019
Event4th Conference on MicroFluidic Handling Systems, MFHS 2019 - De Kleine Willem, Enschede, Netherlands
Duration: 2 Oct 20194 Oct 2019
Conference number: 4
https://www.mfhs2019.org/

Conference

Conference4th Conference on MicroFluidic Handling Systems, MFHS 2019
Abbreviated titleMFHS 2019
CountryNetherlands
CityEnschede
Period2/10/194/10/19
Internet address

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electrodes
silicon
microchannels
fabrication
microfluidic devices
actuation
slits
readout
dissipation
membranes
sensors
thin films
geometry
metals

Cite this

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J., & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Zhao, Yiyuan ; Veltkamp, Henk-Willem ; Schut, Thomas Victor Paul ; Groenesteijn, Jarno ; de Boer, Meint J. ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.4 p.
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abstract = "Surface Channel Technology is widely used as the fabrication process to make free-hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes between the adjacent free-hanging microfluidic channels using the SCT process. Essentially, two parameters are used to tune the final cross-sectional geometry and size of the bulk silicon electrodes. One is the distance between two adjacent rows of slits and the other is the width of flat membrane above the microchannels. The advantageous physical features make bulk silicon electrodes suitable for many sensing and actuation applications. When the bulk silicon electrodes are used as microheaters, they allow higher power dissipation. This is because of their larger cross-sectional areas compared to the commonly used thin film metal microheaters. Moreover, as sensing electrodes, bulk silicon electrodes are located between the sidewalls of two adjacent microchannels. This makes them applicable as the sidewall resistive or capacitive readout in e.g. flow sensors.",
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Zhao, Y, Veltkamp, H-W, Schut, TVP, Groenesteijn, J, de Boer, MJ, Wiegerink, RJ & Lötters, JC 2019, 'Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology' Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands, 2/10/19 - 4/10/19, pp. 116-119.

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. / Zhao, Yiyuan ; Veltkamp, Henk-Willem ; Schut, Thomas Victor Paul; Groenesteijn, Jarno; de Boer, Meint J.; Wiegerink, Remco J.; Lötters, Joost Conrad.

2019. 116-119 Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Research output: Contribution to conferencePaperAcademic

TY - CONF

T1 - Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

AU - Zhao, Yiyuan

AU - Veltkamp, Henk-Willem

AU - Schut, Thomas Victor Paul

AU - Groenesteijn, Jarno

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

PY - 2019/10/2

Y1 - 2019/10/2

N2 - Surface Channel Technology is widely used as the fabrication process to make free-hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes between the adjacent free-hanging microfluidic channels using the SCT process. Essentially, two parameters are used to tune the final cross-sectional geometry and size of the bulk silicon electrodes. One is the distance between two adjacent rows of slits and the other is the width of flat membrane above the microchannels. The advantageous physical features make bulk silicon electrodes suitable for many sensing and actuation applications. When the bulk silicon electrodes are used as microheaters, they allow higher power dissipation. This is because of their larger cross-sectional areas compared to the commonly used thin film metal microheaters. Moreover, as sensing electrodes, bulk silicon electrodes are located between the sidewalls of two adjacent microchannels. This makes them applicable as the sidewall resistive or capacitive readout in e.g. flow sensors.

AB - Surface Channel Technology is widely used as the fabrication process to make free-hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes between the adjacent free-hanging microfluidic channels using the SCT process. Essentially, two parameters are used to tune the final cross-sectional geometry and size of the bulk silicon electrodes. One is the distance between two adjacent rows of slits and the other is the width of flat membrane above the microchannels. The advantageous physical features make bulk silicon electrodes suitable for many sensing and actuation applications. When the bulk silicon electrodes are used as microheaters, they allow higher power dissipation. This is because of their larger cross-sectional areas compared to the commonly used thin film metal microheaters. Moreover, as sensing electrodes, bulk silicon electrodes are located between the sidewalls of two adjacent microchannels. This makes them applicable as the sidewall resistive or capacitive readout in e.g. flow sensors.

M3 - Paper

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EP - 119

ER -

Zhao Y, Veltkamp H-W, Schut TVP, Groenesteijn J, de Boer MJ, Wiegerink RJ et al. Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 2019. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.